作者：郝家祺¹, 张雯¹, 何巍¹, 董明利², 祝连庆¹

作者单位：1. 北京信息科技大学 光纤传感与系统北京实验室，北京 100016;
2. 北京信息科技大学 光电测试技术及仪器教育部重点实验室，北京 100192

关键词：光纤传感器;三光束干涉;电弧放电;温度测量;折射率测量

摘要：

该文提出一种全单模光纤的三光束干涉光纤法布里珀罗结构传感器。对三光束干涉光纤法布里珀罗结构传感原理进行分析，并阐述三光束干涉结构的温度、折射率双参数传感机理。空气腔结构使用熔接机电弧放电制作，结合光纤精密切割技术将一端尾纤切平，形成三光束干涉光纤法布里珀罗结构。设计并搭建实验系统对温度和折射率进行测试，测温范围为30 ~100 ℃，该传感器温度灵敏度为8.17 pm/℃，线性度可达0.9983。折射率的测量范围为1.3316~1.3430时，该传感器灵敏度为–49.9 dB/RIU，线性度为0.9856，当折射率测量范围为1.3430~1.3551时，折射率灵敏度为–21.6 dB/RIU，此时的线性度为0.9735。实验结果表明，该传感器可用于温度和折射率的双参数精确测量。

Three-beam interferometric optical fiber Fabry-Perot structure and its dual-parameter testing
HAO Jiaqi¹, ZHANG Wen¹, HE Wei¹, DONG Mingli², ZHU Lianqing¹
1. Beijing Laboratory of Optical Fiber Sensing and System, Beijing Information Science & Technology University, Beijing 100016, China;
2. Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science & Technology University, Beijing 100192, China
Abstract: A three-beam interference fiber optic Fabry-Perot structure sensor is proposed. The principle of three-beam interference structure is analyzed, and the temperature and refractive index sensing mechanism of the three-beam interference structure is described. The structure of Fabry-Perot cavity is made by arc discharge of fusing electromechanical device. By combining with the precision cutting technology of optical fiber, one end of tail fiber is cut flat to form a three-beam interference Fabry-Perot structure. Design and build a test platform for temperature and refractive index. When the temperature range is 30-100 ℃, the heating sensitivity is 8.17 pm/℃, with the linearity 0.9983. When the refractive index range is from 1.3316 to 1.3430, the sensitivity is –49.9 dB/RIU, with a linearity is 0.9856. When the refractive index is from 1.3430 to 1.3551, the sensitivity of the sensor is –21.6 dB/RIU, with a linearity is 0.9735. Experimental results show that the popsed sensor can be used for accurate dual-parameters measurement for temperature and refractive index.
Keywords: optical fiber sensors;three-beam interferometric;arc discharge;temperature measurement;refractive index measurement
2020, 46(12):22-27  收稿日期: 2020-05-19;收到修改稿日期: 2020-06-27
基金项目: 高等学校学科创新引智计划资助(D17021)；载人航天预研项目（20184112043）
作者简介: 郝家祺(1993-),女,北京市人,硕士研究生,专业方向为光纤传感
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