作者：周帅1, 郑大勇1, 陈海鑫1, 陈伟2
作者单位：1. 工业和信息化部电子第五研究所, 广东 广州 510610;
2. 北京晨晶电子有限公司, 北京 100015
关键词：内部气氛含量;小腔体器件;误差分析;气密性封装;夹具设计
摘要：
根据气密封器件内部气氛含量的测试原理，从0.01cc小腔体气密封器件内部气氛含量测试的取样、校准及夹具等方面分析造成0.01cc（1 cc=1 cm3）小腔体气密封器件内部气氛含量测试结果误差的主要因素，其中夹具的结构设计是造成误差的最大影响因素。随后从缩小测试夹具腔体的密封范围、减少穿刺后的内部气氛向外扩散、提高0.01cc小腔体内部气氛进入设备分析室的浓度等方面对夹具优化设计。最后采取同批次型号的0.01cc小腔体器件进行新旧夹具分组比对分析，从测试数据的离散性、设备的端口气氛浓度数据分析可见，经过优化的夹具能够有效提高0.01cc小腔体气密封器件内部气氛含量测试的准确性。这一改进途径也可为提高其他气密封器件内部气氛含量检测的可行性及准确性提供思路。
Study on method for internal atmosphere content test of 0.01cc small cavity hermetic device
ZHOU Shuai1, ZHENG Dayong1, CHEN Haixin1, CHEN Wei2
1. The 5th Electronic Research Institute of MⅡT, Guangzhou 510610, China;
2. Beijing Chenjing Electronics Co., Ltd., Beijing 100015, China
Abstract: Based on the testing principle of the internal atmosphere content of the hermetic device, the main factors causing the testing result error of the internal atmosphere content of 0.01cc small cavity hermetic device were analyzed from the aspects such as the sampling, calibration and fixture of the content test of the internal atmosphere within the 0.01cc small cavity hermetic device, and it turned out that the structural design of the fixture is the most important factor resulting in the error. Subsequently, the fixture design was optimized from the aspects such as reducing the sealing range of the testing fixture cavity, reducing the outward diffusion of the internal atmosphere after puncturing and improving the concentration of internal atmosphere of 0.01cc small cavity into the equipment analysis laboratory. Finally, the comparative analysis on the new and old fixtures was carried out in group by using the 0.01cc small cavity hermetic devices in same batch and same type. The analysis on the discreteness of the testing data and the port atmosphere concentration data of the device showed that the optimized fixture can effectively improve the accuracy of the internal atmosphere content of the 0.01cc small cavity hermetic device, which also provides ideas for improving the feasibility and accuracy of the content detection of the internal atmosphere of other hermetic devices.
Keywords: internal atmosphere content;small cavity device;error analysis;hermetic package;fixture design
2018, 44(2): 20-25 收稿日期: 2017-08-20;收到修改稿日期: 2017-09-15
基金项目: 广东省自然科学基金资助项目（2015A030310331，2015A030306002）
作者简介: 周帅(1984-),男,贵州都匀市人,工程师,硕士,研究方向为电子元器件检测及可靠性评价。
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