作者：翟玉卫, 丁晨, 李灏, 荆晓冬, 刘岩, 吴爱华
作者单位：中国电子科技集团公司第十三研究所，河北 石家庄 050051
关键词：光热反射热成像;环境温度;热反射率校准系数;非线性
摘要：
为验证热反射热成像测温中温度对热反射率校准系数（CTR）的影响，采用一套热反射热成像测温装置在较宽的温度范围内对由硅衬底和金组成的被测件进行两种空气热对流条件下的测试。热反射热成像测温装置采用530 nm波长LED作为光源；在20~90 ℃范围内以10 ℃为间隔分别测量被测件表面金和硅的CTR；采用一个小风扇改变空气热对流。发现空气热对流较强时， CTR在高温段快速减小；空气热对流较弱时，CTR在高温段减小速度放缓，认为主要原因是较强的空气热对流会导致测温装置镜头受热而引起测温装置读数降低。试验结果证明，来自测温装置控温平台的较高温度会引起CTR测量结果偏低。
Study on temperature dependence of thermoreflectance calibration coefficient
ZHAI Yuwei, DING Chen, LI Hao, JING Xiaodong, LIU Yan, WU Aihua
The 13th Research Institute, CETC, Shijiazhuang 050051, China
Abstract: In order to verify the influence of temperature on thermoreflectance calibration coefficient (CTR), a thermoreflectance thermography setup was used to test a DUT consisting of Si substrate and Au under two kinds of air thermal convention conditions. A 530 nm wavelength LED was used as the light source of the thermoreflectance thermography setup; the CTR of Si and Au was measured between 20-90 ℃ in steps of 10 ℃, respectively; a little fan was used to change the air thermal convention. It was revealed that CTR reduced rapidly under higher temperature conditions when the air thermal convention is strong; when the air thermal convention is suppressed, the downward trend of CTRwas slowing down , the reason were due to that the strong air thermal convention would heating the lens and cause the reduce of counts of the measurement setup. The results show that the high temperature from experiment setup itself would cause lower CTR measurement results.
Keywords: thermoreflectance thermography;ambient temperature;thermoreflectance calibration coefficient;nonlinearity
2023, 49(8):21-27 收稿日期: 2021-08-31;收到修改稿日期: 2021-12-09
基金项目:
作者简介: 翟玉卫(1983-),男,河北晋州市人,高级工程师,硕士,主要从事半导体器件热可靠性检测与分析方面的研究工作
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