作者：陈佳艺1, 王建新2, 白福忠1,3, 徐永祥1,3
作者单位：1. 内蒙古工业大学机械工程学院，内蒙古 呼和浩特 010051;
2. 西南科技大学理学院，四川 绵阳 621010;
3. 内蒙古自治区特殊服役智能机器人重点实验室，内蒙古 呼和浩特 010051
关键词：液晶空间光调制器(LC-SLM);相位调制特性;棋盘形相位光栅;衍射测量法
摘要：
为测量高灰阶液晶空间光调制器（LC-SLM）整体相位调制特性，引入二维棋盘形相位光栅衍射测量方法。根据傅里叶光学原理，经过理论推导和仿真分析得到零级衍射光强与相位调制量之间的关系。搭建含有参考光束的衍射实验系统，通过适当的光斑图像处理计算出零级衍射相对光强，从而获得相位调制特性曲线，并与干涉测量法实验结果进行对比。实验结果显示两种方法得到的调制曲线高度相似，相关系数达0.996；表明相位光栅衍射法能用于测量LC-SLM整体相位调制，可获得2π相位调制范围内的特性曲线。最后分析衍射法与干涉法的特点与局限，可为实际测量提供有益参考。
Phase modulation characteristics measurement of high gray-level LC-SLM by using phase grating diffraction method
CHEN Jiayi1, WANG Jianxin2, BAI Fuzhong1,3, XU Yongxiang1,3
1. School of Mechanical Engineering, Inner Mongolia University of Technology, Huhhot 010051, China;
2. College of Science, Southwest University of Science and Technology, Mianyang 621010, China;
3. Inner Mongolia Key Laboratory of Special Service Intelligent Robotics, Hohhot 010051, China
Abstract: The diffraction measuring method with two-dimensional checkerboard phase grating is introduced to measure the whole phase modulation characteristics of high gray-level liquid-crystal spatial light modulator (LC-SLM). According to the Fourier optical principle, the relation between the zero-order diffraction intensity and the phase delay is obtained through theoretical derivation and simulation analysis. The diffraction experimental system with reference beam is built and then the relative intensity of zero-order diffraction is calculated by using appropriate image processing for diffraction pattern. The phase modulation characteristic curveis obtained, and it is compared with the experimental result of interferometric method. The results show that the modulation curves from two methods are highly similar with the correlation coefficient up to 0.996. It is indicated that the phase grating diffraction method can be used to measure the whole phase modulation of LC-SLM and the characteristic curves within the range of 2π phase modulation can be obtained. Finally, the feature and limitation of two methods are analyzed, which can provide the useful reference for practice measurement.
Keywords: liquid crystal spatial light modulator (LC-SLM);phase modulation characteristics;checkerboard phase grating;diffraction measurement method
2022, 48(3):35-40 收稿日期: 2020-12-18;收到修改稿日期: 2021-03-09
基金项目: 国家自然科学基金(51765054，11902277，62165011)；内蒙古自治区自然科学基金（2020LH06002）
作者简介: 陈佳艺（1994-），女，内蒙古鄂尔多斯市人，硕士研究生，专业方向为光学测试方面的研究
参考文献
[1] MCMANAMON P F, DORSCHNER T A. Optical phased array technology[J]. Proceedings of IEEE, 1996, 84(2): 268-298
[2] 张志学, 薛秀生, 阮永丰, 等. SiC晶体测温技术研究[J]. 中国测试, 2017, 43(5): 1-4
[3] O’BRIEN D C, FAULKNER G E, WILKINSON T D, et al. Design and analysis of an adaptive board-to-bo-ard dynamic holographic interconnect[J]. App-lied Optics, 2004, 43(16): 3297-3305
[4] 叶必卿, 松田清史, 福智旻央, 等. 在粗糙表面上用液晶空间光调制器进行振动测量[J]. 光学学报, 2006(4): 557-561
[5] 蔡冬梅, 姚军, 姜文汉. 液晶空间光调制器用于波前校正的性能[J]. 光学学报, 2009, 29(2): 285-291
[6] CHENG H, LV Q Q, WEI S, et al. Rapid phase retrieval using SLM based on transport of intensity equation[J]. Infrared and Laser Engineering, 2018, 47(7): 287-291
[7] 陈怀新, 隋展, 陈祯培, 等. 液晶电视(LCTV)的光学调制特性及其应用[J]. 中国激光, 2000, 27(8): 741-745
[8] 任秀云, 蔡春伟, 王翥, 等. 横向剪切干涉法共路测量LCSLM的相位调制特性[J]. 光子学报, 2007, 36(5): 899-890
[9] 赵晓凤, 李大海, 陈祯培. 利用径向剪切干涉法测量液晶空间光调制器的位相调制特性[J]. 四川大学学报(自然科学版), 2002, 39(4): 657-679
[10] 郝家祺, 张雯, 何巍, 等. 三光束干涉光纤法布里珀罗结构及其双参数测试研究[J]. 中国测试, 2020, 46(12): 22-27
[11] CAO Z L, XUAN L, HU L F, et al. Investigation of optical testing with a phase-only liquid crystal spatial light modulator[J]. Optics Express, 2005, 13(4): 1059-1065
[12] 张洪鑫, 张健, 吴丽莹. 泰曼-格林干涉仪测量液晶空间光调制器的相位调制特性[J]. 中国激光, 2008, 35(9): 1360-1364
[13] 孔宁宁, 李抄, 夏明亮, 等. Mask相位法校准液晶空间光调制器的相位调制特性[J]. 光学学报, 2011, 31(3): 13-20
[14] 徐豪, 张运海, 张欣, 等. 结合高位深相位光栅图的LC-SLM标定[J]. 激光技术, 2017, 41(4): 515-520
[15] 杜升平, 傅承毓, 黄永梅, 等. 一种液晶相位调制特性的测量方法[J]. 光子学报, 2017, 46(1): 87-94
[16] 王发民, 张运海, 黄维, 等. 采用条形光栅相位图的液晶空间光调制器的标定[J]. 红外与激光工程, 2019, 48(7): 89-96
[17] 柯熙政, 韩柯娜. 液晶空间光调制器的波前模拟及波前校正[J]. 激光与光电子学进展, 2019, 56(5): 162-167
[18] BAI F Z, HAN F, XU Y X, et al. Modified Fourier-transform method for phase-shift calibration[J]. Optics and Lasers in Engineering, 2011, 49(7): 932-936
