作者：张晟1, 龚涛波2, 王鲁康2, 刘元2, 赵玉龙2, 王鹏3
作者单位：1. 西安交通大学体育中心，陕西 西安 710049;
2. 西安交通大学机械工程学院，陕西 西安 710049;
3. 陕西理工大学机械工程学院，陕西 汉中 723000
关键词：人体姿势捕捉;MEMS;加速度计;高频响;高灵敏度
摘要：
在人体上穿戴加速度计能够实现对人体运动姿势捕捉，进而在体育教学和运动训练中有利于提升教学和训练效果，而加速度计的固有频率和测量灵敏度存在相互制约的关系。为此，研制一种孔缝复合八梁结构的MEMS加速度计。该加速度计质量块由四根宽大的支撑梁和四根短小的敏感梁共同支撑，在敏感梁上引入应力集中孔。采用离子注入、背腔干法刻蚀、ICP刻蚀、金属溅射、阳极键合等工艺制作加速度计芯片，并对芯片进行封装。分别采用离心机测试法和简谐激励法对加速度计的静态性能和动态性能进行测试。结果表明，该加速度计的单位电压灵敏度达到0.21 mV/(g·V)，固有频率高达14.22 kHz，同时拥有高灵敏度和高频响性能。
Development of a wearable MEMS miniaturized accelerometer for motion gesture capture
ZHANG Sheng1, GONG Taobo2, WANG Lukang2, LIU Yuan2, ZHAO Yulong2, WANG Peng3
1. Center for P. E., Xi'an Jiaotong University, Xi'an 710049, China;
2. School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China;
3. School of Mechanical Engineering, Shaanxi University of Technology, Hanzhong 723000, China
Abstract: The installation of accelerometers on the motion joints of the human body can realize the capture of the human body posture, which is beneficial to improve the teaching and training effects in physical education and sports training. However, the natural frequency and measurement sensitivity of the accelerometer are mutually restricted. To this end, a MEMS accelerometer with a hole-slit compound eight-beam structure is developed. The mass block of the accelerometer is supported by four wide support beams and four short sensitive beams. And stress concentration holes are made in the sensitive beams. The accelerometer chip is fabricated by ion implantation, dry etching, ICP etching, metal sputtering, anode bonding and other processes, and the chip is packaged. The static performance and dynamic performance of the accelerometer are respectively tested by the centrifuge test method and the simple harmonic excitation method. The result shows that the unit voltage sensitivity of the accelerometer reaches 0.21 mV/(g·V), the natural frequency is up to 14.22 kHz, and it simultaneously has high sensitivity and high frequency response performance.
Keywords: body postures capture;MEMS;accelerometer;high-frequency response;high sensitivity
2021, 47(1):82-87 收稿日期: 2020-10-01;收到修改稿日期: 2020-11-26
基金项目:
作者简介: 张晟(1972-),男,陕西咸阳市人,副教授,硕导,研究方向为体育教育与训练
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