作者：张雯¹, 李昊业¹, 何巍², 董明利², 祝连庆^1,2

作者单位：1. 北京信息科技大学 光纤传感与系统北京实验室，北京 100016;
2. 北京信息科技大学 光电测试技术及仪器教育部重点实验室，北京 100192

关键词：光纤气泡;化学腐蚀;精密熔接;压力传感;误差分析

摘要：

针对临床心脏固定器吸附压力的监测问题，提出一种全单模光纤气泡法布里珀罗（Fabry-Perot，FP）结构的压力传感器件，并对其压力传感特性进行测试研究和误差分析。建立光纤气泡的压力传感模型，通过化学腐蚀结合电弧放电技术实现光纤气泡结构的制备。针对压力测试的实验要求，设计并分析不同进气孔位的流场特性，优化密闭腔体结构。搭建气路系统，对光纤气泡结构进行压力传感特性测试，分析重复测量条件下器件的灵敏度和线性度，并进行误差分析。实验室数据表明：正压0.1~0.2 MPa测试范围内，光纤气泡灵敏度为2.56 nm/MPa；负压–5~–30 kPa测试范围内，光纤气泡灵敏度为1.72 nm/MPa，线性拟合度整体优于0.9。该文可为光纤传感器在心脏固定器吸附压力监测问题中的应用提供一定的前期参考。

Pressure sensing characterization and error analysis of the fiber-optic air-bubble
ZHANG Wen¹, LI Haoye¹, HE Wei², DONG Mingli², ZHU Lianqing^1,2
1. Beijing Laboratory of Optical Fiber Sensing and System, Beijing Information Science & Technology University, Beijing 100016, China;
2. Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science & Technology University, Beijing 100192, China
Abstract: To monitor the suction pressure of clinical cardiac fixers, a pressure sensor with all-single-mode fiber-optic air-bubble Fabry-Perot (FP) structure was proposed, and its pressure sensing characteristics were tested and the error analysis was studied. The pressure sensing model of the fiber-optic air-bubble was established, and the sensor was fabricated using the chemical corrosion combined with arc discharge technology. To comply with the practical pressure test requirements, the flow field characteristics of different inlet positions were designed and analyzed, and the structure of the closed cavity was optimized. The pressure sensing system was built to characterize the fiber-optic air-bubble, the sensitivity and linearity of the device were obtained and the error was analyzed. Experimental results show that the fiber-optic air-bubble's sensitivity is 2.56 nm/MPa within the positive pressure range of 0.1-0.2 MPa. Within the negative pressure range of –5-–30 kPa, the pressure sensitivity is 1.72 nm/MPa, and the overall fitting linearity is above 0.9. This paper can be of the reference value for the application of fiber optic sensor in the monitoring of cardiac fixator suction pressure.
Keywords: fiber-optic air-bubble;chemical etching;precise splicing fusion;pressure sensing;error analysis
2020, 46(12):142-148  收稿日期: 2020-09-24;收到修改稿日期: 2020-10-25
基金项目: 国家自然科学基金（61801030）；北京市自然科学基金资助项目（4202027）；高等学校学科创新引智计划资助项目（D17021）；中国科协青年人才托举工程项目（2018QNRC001）；载人航天预研项目（20184112043）
作者简介: 张雯(1988-),女,河南信阳市人,副教授,博士,研究方向为光纤传感
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