作者：王博文¹, 刘兴鹏², 彭斌¹, 李凌¹, 岳虎虎¹, 房赛¹, 张万里¹

作者单位：1. 电子科技大学 电子薄膜与集成器件国家重点实验室，四川 成都 610054;
2. 桂林电子科技大学 广西精密导航技术与应用重点实验室，广西 桂林 541004

关键词：声表面波;温度传感器;CTGS;多层薄膜电极

摘要：

SAW温度传感器具有无线无源的特点，在高温等恶劣环境中具有良好的应用前景。电极的高温稳定性是影响SAW温度传感器件工作温度的重要因素，采用耐高温的压电材料CTGS作为压电基底，通过PLD技术在压电基底表面制备 Al₂O₃/ITO/Pt/Al₂O₃ 多层薄膜作为电极，氧化铝作为保护层能够抑制高温下金属薄膜的团聚现象以提高电极的高温稳定性，利用高温下ITO薄膜的导电性来补偿Pt薄膜高温下增大的电阻率，这种多层薄膜结构能够在高温环境中保持较好的稳定性。测试结果表明，所制作的SAW温度传感器可以工作至1000 ℃，在 1000 ℃环境中持续工作5 h，并具有较好的重复性，这是由于所采用的Pt/ITO薄膜电极在高温下仍具有良好的导电性所致。

Pt/ITO thin film electrode SAW temperature sensor working at 1000 ℃
WANG Bowen¹, LIU Xingpeng², PENG Bin¹, LI Ling¹, YUE Huhu¹, FANG Sai¹, ZHANG Wanli¹
1. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China;
2. Guangxi Key Laboratory of Precision Navigation Technology and Application, Guilin University of Electronic Technology, Guilin 541004, China
Abstract: SAW sensors have important potential applications in harsh environments such as high temperature due to its ability of wireless and passive operation. The high temperature stability of the electrode is the important factors that affect work temperature SAW temperature sensor, the use of high-temperature piezoelectric materials CTGS as piezoelectric substrate, by PLD technology in the piezoelectric substrate surface preparation of Al₂O₃/ITO/Pt/Al₂O₃ multilayer film as electrode, alumina as a protective layer metal film can restrain the heat reunion phenomenon in order to improve the high temperature stability of the electrode, the conductivity of ITO thin film with high temperature increases to compensate for Pt thin film under high temperature resistivity of the multilayer film structure can maintain good stability in high temperature environment. The results show that the produced SAW sensor can work up to 1000 ℃ with good repeatability, is capable of operating continuously at 1000 ℃ for 5 hours, which is originated from the good conductivity of the Pt/ITO thin film electrode at high temperature.
Keywords: surface acoustic wave;temperature sensor;CTGS;multilayer film electrode
2020, 46(12):67-72  收稿日期: 2020-10-28;收到修改稿日期: 2020-11-28
基金项目:
作者简介: 王博文(1994-),男,新疆乌鲁木齐市人,硕士研究生,专业方向为声表面波传感器的制备与性能研究
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