作者：徐立1,2, 郑培亮1,2, 李闯2, 黄振宇1,2, 李倩2
作者单位：1. 广东省现代几何与力学计量重点实验室, 广东 广州 510405;
2. 广东省计量科学研究院, 广东 广州 510405
关键词：位置误差;叉指电容;力学特性;微小力;数值模拟
摘要：
为确定基于静电力原理微小力装置位置误差对输出结果影响,采用有限元分析方法对一种新型叉指状微小力装置位置变化时输出微小力特性进行分析。通过比较装置极板位置在X、Y、Z方向6个自由度上发生独立运动及复合运动时装置输出微小力变化规律,探讨装置位置误差对叉指状微小力装置力学特性影响;并确定各自由度上装置位置误差对输出微小力影响较小区间。结果表明不同自由度上叉指状装置位置误差对装置输出结果影响程度不同;位置误差控制在一定范围内,对装置输出微小力影响较小,可为简化电容式微小力源装置设计与制造提供理论依据。
Effects of position errors on mechanical characteristics of inter-digital micro force devices
XU Li1,2, ZHENG Peiliang1,2, LI Chuang2, HUANG Zhenyu1,2, LI Qian2
1. Guangdong Provincial Key Laboratory of Modern Geometric and Mechanical Metrology Technology, Guangzhou 510405, China;
2. Guangdong Provincial Institute of Metrology, Guangzhou 510405, China
Abstract: To determine the effects of position errors of inter-digital micro-force devices on output results, the mechanical characteristics of a new inter-digital capacitor micro force device were analyzed by finite element method. The varying patterns of the output micro forces of the device was discussed when the polar plate of the device moved independently and compositely on the six free degrees in X, Y, Z directions, then the position error could be found. The small influence area of position error is determined on each of the aforementioned degree of freedom; it is comparatively small when the position error is controlled within a certain range. The results have served as a theoretical basis for the design and manufacturing of simplified capacitor micro-force devices.
Keywords: position error;inter-digital capacitor;mechanical characteristics;micro-force;numerical simulation
2015, 41(11): 114-118 收稿日期: 2015-03-10;收到修改稿日期: 2015-05-23
基金项目: 国家质检总局科技计划项目(2013QK259);广东省公益研究与能力建设专项资金项目;(2014A040401044)
作者简介: 徐立(1983-),男,湖南长沙市人,工程师,博士,主要从事力学计量与测试研究工作。
参考文献
[1] Chen S J, Pan S S, Lin Y C. Comparison of milligram scale deadweights to electrostatic forces[J]. Acta Imeko,2014,3(3):68-72.
[2] Chen S J, Pan S S. A force measurement system based on an electrostatic sensing and actuating technique for calibrating force in a micro newton range with a resolution of nano-newton scale[J]. Measurement Science and Technology,2011,22(4):45-104.
[3] 齐永岳,刘明,林玉池,等. 可溯源至质量的静电力复现与测量技术[J]. 仪器仪表学报,2011,32(5):1063-1068.
[4] Kim M, Pratt J R. SI traceability:Current status and future trends for forces below 10 micro newtons[J]. Measurement,2010,43(2):169-182.
[5] Stefănescu D M, Anghel M A. Electrical methods for force measurement-A brief survey[J]. Measurement,2013,
46(2):949-959.
[6] Kim M S, Pratt J R, Brand U, et al. Report on the first international comparison of small force facilities:a pilot study at the micro Newton level[J]. Metrologia,2012,49(1):70.
[7] Pratt J R, Kramar J A, Newell D B, et al. Review of SI traceable force metrology for instrumented indentation and atomic force microscopy[J]. Measurement Science & Technology,2005,16(11):2129-2137.
[8] Pratt J R, Kramar J A. SI realization of small forces using an electrostatic force balance[C]//Proc. XVIII IMEKO World Congress on Metrology for a Sustainable Development,2006:109.
[9] Physikalisch T, Bundesanstalt B, Berlin B. Facility and methods for the measurement of micro and nano forces in the range below 10-5 N with a resolution of 10-12N[J]. Measurement Science and Technology,2007(18):360-366.
[10] Leach R, Blunt L, Chetwynd D, et al. Recent advances in traceable nanoscale dimension and force metrology in the UK[J]. Measurement Science & Technology,2006,17(3):467-476.
[11] Hu G, Song L, Meng F, et al. Research and development of small force standards at NIM[C]//International Journal of Modern Physics:Conference Series. World Scientific Publishing Company,2013(24):1360020.
[12] 蔡雪,赵美蓉,郑叶龙,等. 用于10-6N~10-5N微力测量的柔性铰链机构设计[J]. 传感技术学报,2014(11):1451-1456.
[13] 刘明,林玉池,郑叶龙,等. 利用静电场原理复现微小力值的实验研究[J]. 传感技术学报,2012,25(1):33-37.
[14] Munz M. Force calibration in lateral force microscopy:a review of the experimental methods[J]. Journal of Physics D Applied Physics,2010,43(6):63001-63034(34).
[15] 徐立,郑培亮,李倩,等. 叉指状微小力装置力学特性的数值模拟与分析[J]. 中国测试,2015,41(9):115-119.
