作者：葛鹏1,2, 储政勇1,2, 瞿启云1,2, 刘小楠1,2, 许磊3, 雷英俊3, 李瑞君3
作者单位：1. 合肥公共安全技术研究院，安徽 合肥 230031;
2. 中国电子科技集团公司第三十八研究所，安徽 合肥 230031;
3. 合肥工业大学，安徽 合肥 230009
关键词：激光雷达;MEMS振镜;光学系统设计;ZEMAX光学设计
摘要：
MEMS激光雷达采用MEMS振镜作为扫描器件，具有结构固态化、质量轻、功耗低等显著优点，是车规级激光雷达的主流技术路线。MEMS振镜也存在机械扫描角较小的缺点，因而MEMS激光雷达难以实现较大的扫描视场角。针对传统光学扩角系统发散角大的不足，提出一种可以实现均匀扫描的光学扩角系统。采用光学设计的方法，建立多镜片搭配的光学扩角系统模型，并借助ZEMAX软件完成各镜片光学结构参数设计，并通过光线追踪对设计指标进行仿真评估。根据仿真结果，该系统可以将MEMS激光雷达的扫描角度扩大1.6倍，且在100 m处的激光光斑直径小于100 mm。MEMS激光雷达扫描角度较小和出射光束发散角较大的问题得到显著改善。
Design of optical angle expansion system for MEMS LIDAR
GE Peng1,2, CHU Zhengyong1,2, QU Qiyun1,2, LIU Xiaonan1,2, XU Lei3, LEI Yingjun3, LI Ruijun3
1. Hefei Public Safety Technology Research Institute, Hefei 230031, China;
2. No.38 Research Institute, China Electronics Technology Group Corporation, Hefei 230031, China;
3. Hefei University of Technology, Hefei 230009, China
Abstract: MEMS LIDAR uses MEMS mirrors as scanning devices, which have the significant advantages of solid-state structure, light weight and low power consumption, and are the mainstream technology route for vehicle-grade LIDAR. MEMS mirrors also have the disadvantage of small mechanical scanning angle, thus it is difficult to achieve a large scanning field of view for MEMS LIDAR. For the shortage of large divergence angle of the conventional optical angle expansion system, an optical angle expansion system that can realize uniform scanning has been proposed. The optical design method is used to establish the model of the optical angle expansion system with multiple lenses, and the optical structure parameters of each lens are designed with the ZEMAX software, and the design indexes are simulated and evaluated by ray tracing. According to the simulation results, the system can increase the scanning angle of MEMS LIDAR by 1.6 times, and the laser spot diameter at 100 m is less than 100 mm, which significantly improves the problem of the small scanning angle and the large divergence angle of the MEMS oscillator.
Keywords: LIDAR;MEMS mirror;optical system design;ZEMAX optical design
2022, 48(12):60-66 收稿日期: 2021-10-21;收到修改稿日期: 2021-12-27
基金项目: 合肥市高新区雷达技术装备与关键器件及相关应用系统重大新兴产业专项投资计划（2017-340161-39-03-028289）
作者简介: 葛鹏(1986-),男,安徽合肥市人,高级工程师,博士,主要从事光电系统集成研究
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