作者：洪光, 邵静波

作者单位：延边大学理工学院, 吉林延吉 133002

关键词：干涉效应; 半导体激光; 自混频干涉; 粗糙度; 测量; 反射率

摘要：

设计了一种半导体激光自混频干涉法测量表面粗糙度的实验,对半导体激光自混频干涉法测量表面粗糙度中的干涉效应进行了理论分析,推导了干涉信号与表面粗糙度的数学关系式,讨论了影响测量信号的因素。实验结果表明,随着加工表面粗糙度的降低,反射光的强度逐渐增加,被测物体表面的反射率越高,越有利于测量。

Analysis of measuring method for surface roughness by self-mixing interference in a diode laser

HONG Guang, SHAO Jing-bo

College of Science and Engineering, Yanbian University, Yanji 133002, China

Abstract: This paper introduced experimentation on measurement of roughness degree of work piece surface with the self-mixing interference in a diode laser,analyzed theoretically about the self-mixing interference effect and deduced a mathematics expression of the theories model for an interference signal.It also discussed some factors that influencing measurement signal.Results show that with decrease of roughness of object,it gets higher reflectivity and this makes measurement easier.

Keywords: Interference effect; Diode-laser; Self-mixing interference; Surface roughness; Measure; Reflectivity

2006, 32(5): 45-46,135  收稿日期: 2006-1-19;收到修改稿日期: 2006-3-28

基金项目: 

作者简介: 洪光(1961-),男,副教授,主要从事光学测量研究。

参考文献

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