作者：汤云腾

作者单位：中国科学院海西研究院厦门稀土材料研究中心，福建 厦门 361021

关键词：辉光放电质谱法;合金钢;相对灵敏度因子

摘要：

采用辉光放电质谱法（GDMS）分析合金钢中元素相对灵敏度因子（RSF），优化放电电流、气体流量和预溅射时间等条件，排除质谱干扰并选定合适同位素。研究不同放电条件对元素RSF的影响，并比较不同基体下RSF的差异。通过合金钢标准样品建立回归曲线，获得校正后的相对灵敏度因子(RSF_steel)，用于定量分析。结果表明，放电气体流量是元素RSF的主要影响因素，轻元素RSF随放电气体流量增加而减小，重元素RSF随放电气体流量增加而增大。合金钢基体下的大部分元素RSF小于其标准RSF，经RSF_steel校正的测量值与参考值间的相对偏差低于10%，相对标准偏差（RSD）小于5%，准确度和精密度良好。

Determination of relative sensitivity factors of elements in alloy steel by glow discharge mass spectrometry
TANG Yunteng
Xiamen Institute of Rare Earth Materials, Haixi Institutes, Chinese Academy of Sciences, Xiamen 361021, China
Abstract: This paper describes an analytical method to determine the relative sensitivity factors (RSF) of elements in alloy steel by GDMS. The parameters, such as discharge current, gas flow rate and pre-sputtering time were optimized. Also, The mass interferences were investigated and suitable isotopes were selected for analysis. The effects of different discharge conditions on RSF were studied and the differences of RSF between different substrates were compared. The relative sensitivity factors (RSF_steel) obtained by the regression curves established by alloy steel standard samples were used for quantitative analysis. The results showed that the main influence factor of RSF was gas flow rate. With the increase of gas flow rate, RSFs of light elements decreased, but RSFs of heavy elements increased. RSFs of most elements in alloy steel matrix were less than their standard RSFs. Relative deviations between the corrected values and the reference values were less than 10% and the relative standard deviations (RSDs) of most elements were less than 5%. The accuracy and precision were in good agreement.
Keywords: glow discharge mass spectrometry (GDMS);alloy steel;relative sensitivity factors
2024, 50(3):84-89  收稿日期: 2021-11-27;收到修改稿日期: 2022-02-07
基金项目:
作者简介: 汤云腾(1989-),男,福建漳州市人,工程师,硕士,从事材料成分分析研究。
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