作者：王飞, 莫与明, 杜鹏程, 马驰, 张成

作者单位：中国工程物理研究院总体工程研究所，四川 绵阳 621999

关键词：表面粗糙度;电容法;空心橡胶探头;接触式无损测量

摘要：

在常见的金属工件表面粗糙度测试方法中，标准样块比较法为定性测量方法，测量结果会受人为经验影响；而触针法对于大曲率内凹面工件测试存在应用局限，且对于贵重金属零件，触针会产生划痕，带来不利影响。为提供一种快捷的针对贵重金属零件的无损粗糙度测量方法，基于平行板电容法原理，分别针对高曲率内凹表面和平凸表面设计圆柱形柔性测头和空心球型测头，通过工程标定，获得两种测头的表面粗糙度与测点位置接触电容之间的关系模型，最终实现金属工件表面粗糙度的柔性接触式无损测量。针对某车削半球形工件外表面的粗糙度测试表明，在不同纬度线上，工件表面粗糙度各有不同，与光学干涉法测试结果相比量值相当、趋势一致。

Development of metal surface roughness measurement technology based on capacitance principle
WANG Fei, MO Yuming, DU Pengcheng, MA Chi, ZHANG Cheng
Institute of Systems Engineering, China Academy of Engineering Physics, Mianyang 621999, China
Abstract: Among the common metal workpiece surface roughness measurement methods, the standard sample comparison method is a qualitative measurement method, and the measurement results will be affected by human experience. However, the stylus method has application limitations for the testing of large curvature inner concave workpieces, and the stylus will produce scratches for precious metal parts, which will bring adverse effects. In order to provide a fast nondestructive roughness measurement method for precious metal parts, based on the principle of parallel plate capacitance principle, cylindrical flexible probe and hollow spherical probe are designed for high curvature concave and convex surfaces respectively. Through engineering calibration, the relationship model between the surface roughness of the two probes and the contact capacitance at the measuring point position is obtained, Finally, the flexible contact nondestructive measurement of metal workpiece surface roughness is realized. The roughness measurement of the outer surface of a turning hemispherical workpiece shows that the workpiece surface roughness is different at different latitudes, which is equivalent to and consistent with the measurement results of optical interferometry.
Keywords: surface roughness;capacitance principle;hollow rubber probe;contact nondestructive measurement
2023, 49(7):95-100  收稿日期: 2021-10-19;收到修改稿日期: 2021-12-27
基金项目:
作者简介: 王飞(1981-),男,四川绵阳市人,高级工程师,博士,主要研究领域为特种传感与测试
参考文献
[1] 李俊南, 张锁怀, 吕超颖, 等. 粗糙度和预紧力对拉杆转子轮盘接触面静摩擦系数的试验研究[J]. 中国测试, 2018, 242(9): 131-135
[2] 刘源, 刘雨航, 武孟玺, 等. 燃气表气阀配合面粗糙度及形貌特征研究[J]. 中国测试, 2020, 265(8): 143-148
[3] MACEK W, MARCINIAK Z, R BRANCO, et al. A fractographic study exploring the fracture surface topography of S355J2 steel after pseudo-random bending-torsion fatigue tests[J]. Measurement, 2021, 178: 109443
[4] 产品几何技术规范(GPS) 表面结构 区域法 第6部分: 表面结构测量方法的分类: GB/T 33523.6—2017 [S]. 北京: 中国质检出版社, 2017
[5] 何宝凤, 丁思源, 魏翠娥, 等. 三维表面粗糙度测量方法综述[J]. 光学精密工程, 2019, 27(1): 78-93
[6] ALPCA B, CEFA B, MRL B, et al. Roughness measurement of oriented surface by depolarization of scattered light[J]. Optics and Lasers in Engineering, 2019, 112: 87-92
[7] HE Y, ZHANG W, LI Y F, et al. An approach for surface roughness measurement of helical gears based on image segmentation of region of interest[J]. Measurement, 2021, 183: 109905
[8] GIUSTI A,DOTTA M, MARADIA M, et al. Image-based measurement of material roughness using machine learning techniques[J]. Procedia CIRP, 2020, 95: 377-382
[9] 伏德贵, 庞英伯, 袁道成, 等. 激光非接触式表面粗糙度兼位移测量研究[J]. 计量与测试技术, 2000(3): 8-9
[10] 王丽会, 王政平, 张锡芳. 光针扫描法检测光滑表面粗糙度[J]. 光学与光电技术, 2007(6): 38-41
[11] STEFANOWSKI S, FRAYSSINHES R, PINKOWSKI G, et al. Study on the in-process measurements of the surface roughness of Douglas fir green veneers with the use of laser profilometer[J]. European Journal of Wood and Wood Products, 2020, 78(3): 555-564
[12] 杨杰, 吴凡. 粗糙表面可见光散射特性的实验研究[J]. 中国测试, 2009, 35(2): 125-128
[13] 赵灿. 涂层内界面粗糙度超声测量研究[D]. 大连: 大连理工大学, 2015.
[14] 伍伟敏, 卢耀晖. 车削粗糙表面法向接触刚度仿真研究[J]. 中国测试, 2021, 278(9): 163-168
[15] 王飞, 赵川梅, 张成, 等. 一种基于电容法检测粗糙度的柔性探头及其粗糙度算法: CN108387171A[P]. 2018-08-10.