作者：黄晓钉1, 王忠伟1, 蔡建臻1, 佟亚珍1, 王宁2, 虞娇兰1
作者单位：1. 北京东方计量测试研究所，北京 100086;
2. 中国合格评定国家认可中心，北京 100062
关键词：计量学;交流量子化霍尔效应;四端对同轴阻抗电桥;交直流差可计算电阻;快速收敛
摘要：
国际单位制变革后，阻抗参数需溯源至量子化霍尔电阻，其中将交流量子电阻传递到被测交流标准电阻是主要难点之一，需要研制10–8量级的阻抗电桥，而常规精密阻抗电桥的准确度在10–4至10–5量级，仅有四端对同轴阻抗电桥在理论上能实现10–8量级的准确度，但结构十分复杂，需要多次平衡，其过程存在相互影响，使平衡收敛十分缓慢，测量效率很低，同时存在频点单一的问题。针对以上不足，提出微差补偿网络隔离供电和可调虚部补偿输入比例的措施，大幅提高电桥收敛速度，并实现用于交流量子电阻传递的多频点四端对同轴阻抗电桥。同时给出四端对同轴阻抗电桥的校验方法和整体验证的标准器，验证结果表明：研制的交流量子电阻传递电桥10∶1的测量不确定度达到10–8量级。
Development of AC quantum Hall resistance transfer bridge
HUANG Xiaoding1, WANG Zhongwei1, CAI Jianzhen1, TONG Yazhen1, WANG Ning2, YU Jiaolan1
1. Beijing Orient Institute of Measurement and Test, Beijing 100086, China;
2. National Accreditation Institute of Conformity Assessment, Beijing 100062, China
Abstract: International system of units requires that impedance should be traceable to quantum Hall resistance. However, transferring AC quantum Hall resistance to standard resistance is one of the main difficulties, motivating to develop an AC impedance bridge with a relative uncertainty of a few parts in 108. The current accuracy of AC impedance bridge can only reach relative accuracy on a scale from 10–4 to 10–5, while four terminal pair coaxial impedance bridge can theoretically achieve an accuracy of the order of 10–8. But it’ s structure is complex and requires multiple balances. At the same time, the problem of single frequency also needs to be taken into consideration. In view of the above deficiencies, two solutions are proposed, one is isolating the power supply of injection inductive voltage divider and another is making imaginary part compensation input ratio adjustable. As a result, the four terminal pair coaxial impedance bridge used for transferring AC quantum Hall resistance has the ability to reach equilibrium rapidly and adapt to different frequencies. Besides, the calibration method and resistance with calculable AC/DC difference for overall validation are also given. After verification, the measurement uncertainty of the bridge reached relative accuracy of the order of a few parts in 108.
Keywords: metrology;AC quantum Hall effect;four terminal pair coaxial impedance bridge;resistance with calculable AC/DC difference;rapid convergence
2022, 48(11):138-144 收稿日期: 2022-03-28;收到修改稿日期: 2022-06-23
基金项目: 国防“十三五”重点课题（JSJL2016203C01）
作者简介: 黄晓钉（1964-），男，陕西西安市人，研究员，主要从事电磁学计量和量子计量技术的研究工作
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