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首页> 《中国测试》期刊 >本期导读>微区X射线荧光光谱喷墨打印电路无损分析

微区X射线荧光光谱喷墨打印电路无损分析

123    2021-09-23

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作者:李士林1,2, 韩军1, 龙晋桓1, 吴飞斌1, 张超才2

作者单位:1. 中国科学院福建物质结构研究所 泉州装备制造研究所,福建 晋江 362200;
2. 厦门理工学院电气工程与自动化学院,福建 厦门 361024


关键词:喷墨打印;微区扫描;光谱共聚焦线扫描;元素分布


摘要:

金属喷墨打印作为拥有巨大潜力的新兴电子制造技术,但对喷墨打印产品的检测尚未有全面可靠的方法,针对此问题,提出一套检测喷墨打印产品的新方法。利用微区X射线荧光光谱仪对金属喷墨打印样品进行微区扫描,然后提取每个扫描点的不同元素的射线荧光强度,最后将不同元素的荧光强度拼接成二维图像;另一方面,对金属喷墨打印样品进行光谱共聚焦线扫描,得到样品的三维轮廓图。通过对样品的微区X射线荧光微区扫查得到样品的元素分布及元素分布的均匀性,对样品的光谱共聚焦线扫描得到样品线宽、线高。通过微区X射线荧光光谱法及光谱共聚焦线扫描法建立一套可靠的质量检测评价方法,有望为提升金属喷墨打印工艺提供技术支撑。


Nondestructive analysis of inkjet printing circuit based on micro-area X-ray fluorescence spectrum
LI Shilin1,2, HAN Jun1, LONG Jinhuan1, WU Feibin1, ZHANG Chaocai2
1. Quanzhou Institute of Equipment Manufacturing, Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences, Jinjiang 362200, China;
2. School of Electrical Engineering and Automation, Xiamen University of Technonogy, Xiamen 361024, China
Abstract: Metal ink-jet printing is a new electronic manufacturing technology with great potential, but there is no comprehensive and reliable method for the detection of ink-jet printing products. To solve this problem, a set of new methods for the detection of ink-jet printing products is proposed. Microzone X-ray fluorescence spectrometer was used to conduct microzone scanning for metal inkjet printing samples, and then the X-ray fluorescence intensity of different elements in each scanning point was extracted. Finally, the fluorescence intensity of different elements was spliced into a two-dimensional image. On the other hand, the metal ink-jet print sample was scanned by confocal line, and the 3d contour of the sample was obtained. The element distribution and the uniformity of element distribution of the sample were obtained by scanning the X-ray fluorescence microregion of the sample, and the line width and line height of the sample were obtained by scanning the spectral confocal line of the sample. The establishment of a set of stable, reliable and comprehensive quality inspection and evaluation methods by micro-area X-ray fluorescence spectrometry and spectral confocal line scanning method is expected to provide strong technical support for improving the metal inkjet printing process.
Keywords: inkjet printing;microscanning;spectral confocal line scanning;element distribution
2021, 47(9):146-150  收稿日期: 2020-09-08;收到修改稿日期: 2020-10-25
基金项目: 国家自然科学基金项目(11705208);中国科学院对外重点合作项目(121835KYSB20180062);福建省科技计划项目(2018T3007,2019T3025);泉州市科技计划项目(2019STS07)
作者简介: 李士林(1993-),男,河南郑州市人,硕士研究生,专业方向为X射线荧光检测研究
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