作者：程知己, 黄强先, 应前程, 张连生, 王超群, 程荣俊, 李红莉
作者单位：合肥工业大学仪器科学与光电工程学院, 安徽 合肥 230009
关键词：自准直;角度测量;四象限探测器;离焦误差建模
摘要：
在自准直角度测量系统中，当光电接收装置即四象限探测器偏离透镜焦平面时，会在测量系统中引入离焦误差。为提升自准直测量系统的精度，该文利用实验室已有的自准直角度测量系统，将反射镜角度对处于离焦状态的测量系统产生的影响进行分析，利用雷尼绍激光干涉测量系统测得角度值作为标准量，与测量实验系统测得角度量进行对比，根据测量结果求出离焦距离。从实验结果可以看出，将离焦距离求出并对四象限探测器与透镜间间距进行调整后，自准直角度测量曲线重合，证明将离焦误差有效消除。
Analysis and correction of defocus error of auto-collimation measurement system
CHENG Zhiji, HUANG Qiangxian, YING Qiancheng, ZHANG Liansheng, WANG Chaoqun, CHENG Rongjun, LI Hongli
School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China
Abstract: In the auto-collimation angle measurement system, a defocus error is introduced in the measurement system when the four-quadrant detector deviates from the focal plane of the lens. In order to improve the accuracy of the auto-collimation measurement system for better application in scientific research, the auto-collimation angle measurement system of the laboratory is used to analyze the influence of the angle error of the mirror angle generated during the motion on the measurement system in the defocus state with Renishaw laser interferometry. The system is used as a standard quantity, compared with the measured angular quantity of the measurement experiment system, and the defocus distance is obtained by using the measurement results. It can be seen from the experimental results that after the defocus distance is obtained and the spacing between the four-quadrant detector and the lens is adjusted, the auto-collimation angle measurement curves coincide, which proves that defocus error is effectively eliminated.
Keywords: auto-collimation;angle measurement;four-quadrant detector;defocus error modeling
2020, 46(5):7-12 收稿日期: 2019-12-24;收到修改稿日期: 2020-02-11
基金项目: 国家重点研发计划项目（2019YFB2004901）；国家自然科学基金资助项目(51475131，51875163)；安徽省自然科学基金（1908085QE201）
作者简介: 程知己(1994-),男,河北保定市人,硕士研究生,专业方向为微纳米测量技术
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