作者：刘林青¹, 李东升¹, 马建东², 秦昀亮²

作者单位：1. 中国计量大学计量测试工程学院, 浙江 杭州 310018;
2. 长庆油田分公司技术监测中心, 陕西 西安 710021

关键词：双光学灵敏杠杆;内径尺寸检测;小孔衍射;亚像素法

摘要：

针对高效便捷精确测量内径尺寸的问题，该文提出双光杠杆法测量内径尺寸原理，采用两块反射镜形成双光学灵敏杠杆的方法，通过CCD相机采集移动的衍射光斑图像，实现将测头的移动转换为CCD相机上光斑的移动，从而测得内径尺寸。结合反射定律，通过解析几何的办法建立双光学灵敏杠杆法测量内径尺寸的数学模型，并计算两反射镜小角度旋转的21×21种组合情况下内径尺寸的计算结果。根据所建立模型计算设计测头A、测头B分辨力为0.1 μm，可较好地满足微米级的测量需求。该原理性研究为双光杆法内径尺寸测量装置的研制提供理论基础。

The measuring principle of inner diameter with double optical lever method
LIU Linqing¹, LI Dongsheng¹, MA Jiandong², QIN Yunliang²
1. College of Metrology Technology and Engineering, China Jiliang University, Hangzhou 310018, China;
2. Technical Monitoring Center, Changqing Oil Field Branch Company, Xi'an 710021, China
Abstract: Aiming at the problem of efficiently and accurately measuring the inner diameter, this paper, based on the principle of optical lever amplification, uses two mirrors to form a double optical sensitive lever. The CCD camera picks up the laser diffraction spot image, and translates the movement of the probe to the movement of the spot on the CCD camera, which can be measured inside diameter size. Combining with the law of reflection, a mathematical model of double optical sensitive lever amplification was obtained by analyzing the geometry, and the inner diameter of the bearing under 21×21 combinations of two mirrors rotating at a small angle was calculated. According to the established model, the design probe A and probe B have a resolution of 0.1 μm, which can meet the measurement requirement of micrometer well. This research of principle provides a theoretical basis for the development of the device for diameter measurement which with double optical lever method.
Keywords: double optical lever;inner diameter measurement;pinhole diffraction;subpixel method
2019, 45(2):16-21  收稿日期: 2018-02-08;收到修改稿日期: 2018-03-25
基金项目: 国家自然科学基金项目（51775529）
作者简介: 刘林青(1992-),女,河北衡水市人,硕士研究生,专业方向为几何量精密测量
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