作者：高杨1,4, 黄振华2,3, 蔡洵2
作者单位：1. 中国工程物理研究院电子工程研究所, 四川 绵阳 621999;
2. 西南科技大学信息工程学院, 四川 绵阳 621010;
3. 重庆大学新型微纳器件与系统技术国防重点学科实验室, 重庆 400044;
4. 中国科学院高能物理研究所 核探测与核电子学国家重点实验室, 北京 100049
关键词：体声波传感器;读出电路;薄膜体声波谐振器;振荡器;六端口反射计
摘要：
为解决由于FBAR的谐振频率处于射频频段，导致BAW传感器读出电路难以实现的问题，将FBAR振荡器作为六端口反射计射频源，以检测FBAR谐振频率，从而实现BAW传感器信号读出的新型读出电路。在ADS软件中，通过建立FBAR的MBVD模型并采用Pierce拓扑结构实现FBAR振荡器的仿真模型，以及建立六端口反射计的仿真模型，并结合两个仿真模型建立BAW传感器的最小系统模型。BAW传感器最小系统模型的仿真结果表明：由FBAR振荡器和六端口反射计实现BAW传感器读出电路的可行性。为实验验证该结构，搭建一个基于微带六端口网络实物的六端口反射计实验装置，准确地测得1个案例FBAR振荡器的振荡频率为1.5 GHz，该振荡频率就是传感器表头中FBAR的谐振频率。
BAW sensor read-out circuit with a FBAR oscillator as RF source of six-port reflectometer
GAO Yang1,4, HUANG Zhenhua2,3, CAI Xun2
1. Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China;
2. School of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, China;
3. National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China;
4. State Key Laboratory of Particle Detection and Electronics, Institute of High Energy Physics, CAS, Beijing 100049, China
Abstract: Due to the resonance frequency of FBAR at RF frequency bands,causing BAW sensor read-out circuit is difficult to be achieved.To solve this problem,a new type BAW sensor read-out circuit is proposed by using the six-port reflectometer to test FBAR oscillator frequency.In ADS software,the FBAR oscillator simulation model is established by using the MBVD model of FBAR and the topology of Pierce,as well as six-port reflectometer simulation model is established,the minimum system model of the BAW sensor is established by these two simulation model.The simulation results of the minimum system model of the BAW sensor show that the read-out circuit of BAW sensor is implemented by using the FBAR oscillator and the six-port reflectometer based on six-port reflectometer is feasible.In order to experimentally validate this structure,a six-port reflectometer experimental setup based on a real microstrip six-port network is constructed,and the oscillation frequency 1.5 GHz of a FBAR oscillator case is measured.This measured oscillation frequency is just the resonant frequency of the FBAR embedded in a sensor head.
Keywords: bulk acoustic wave sensor;read-out circuit;film bulk acoustic wave resonator(FBAR);oscillator;six-port reflectometer
2016, 42(11): 60-64 收稿日期: 2016-4-12;收到修改稿日期: 2016-4-12
基金项目: 国家自然科学基金（61574131）；中国工程物理研究院超精密加工技术重点实验室基金（2014ZA001）；核探测与核电子学国家重点实验开放课题基金（2016KF02）；西南科技大学特殊环境机器人技术四川省重点实验室开放基金（14zxtk01）
作者简介: 高杨(1972-),男,四川绵阳市人,研究员,博士,从事微电子机械系统研究。
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