作者：徐德, 王艳茹, 冉铮惠

作者单位：中国工程物理研究院计量测试中心, 四川 绵阳 621000

关键词：三平面互检;绝对测量;奇偶函数法;重力变形;有限元分析

摘要：

为分析大口径平面光学元件面形绝对测量的准确度,补偿重力引起的形变误差,在分析基于奇偶函数法的三平面互检算法的基础上,利用3片300 mm口径的待测平面镜进行实验测量分析.对于三平面互检中不同装夹方式下的重力引起镜片形变情况进行有限元仿真分析,据此对测量数据进行修正并对最终面形结果进行补偿,使测量结果更加逼近真实值.

Absolute measurement of large aperture flats and analysis of the influence of gravity

XU De, WANG Yanru, RAN Zhenghui

Metrology and Testing Center of China Academy of Engineering Physics, Mianyang 621000, China

Abstract: When measuring large aperture optical surfaces with phase shifting interferometry, the accuracy of the results may be limited by the accuracy of the reference mirror manufactured as well as the deformation caused by gravity. The method of three flats testing is a well-accepted solution for the absolute measurement of flat surfaces. The fundamental of three flats testing based on even and odd functions are interpreted, and corresponding experiment is carried out with three φ300 mm aperture flats. Surface deformation caused by the gravity of the mirrors fixed in various ways is studied with finite element method, and then the measurement data is revised and the result is amended. Hence the result is more close to the true value.

Keywords: three flats testing;absolute measurement;even and odd functions;deformation caused by gravity;finite element method

2015, 41(4): 14-18  收稿日期: 2014-7-13;收到修改稿日期: 2014-9-10

基金项目: 

作者简介: 徐 德(1983-),男,山东临沂市人,工程师,硕士,主要从事光学计量与测试方面的研究.

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